Each day, a fab uses nearly 4 million gallons of water. Municipal water is purified to ultrapure levels and fed directly to tools on the cleanroom floor.
Water is also used to cool and heat certain systems, such as air handlers. A special boiler and chiller system delivers water at a variety of different temperatures, and reclaims waste heat to save on energy usage. 20% of water is returned back to the fab, while the rest ends up in the wastewater reclamation plant where hazardous compounds are removed in a multi-stage process.
Wastewater reclamation is designed with a goal to return 95% of water back to the city, cleaner than it was when it arrived.