A wide variety of gases and chemicals are utilized in the production process.
Some gases, such as oxygen, nitrogen, and argon, are generated on-site using Air Separation Units from outside air and fed directly to tools.
Oil, moisture, and contaminants as small as .1 micron are removed onsite from outside air to feed critical fabrication processes. Other raw materials arrive via truck.
Process-specific gases and chemicals are housed on the sub fab level and fed directly to tools via a complex network of valve boxes and pipes.